Onyx-6 Indirect Cool

Product Brochure

Now Representing Angstrom Sciences

	Onyx-6 Indirectly Cooled
	Maximum Sputtering Power
	DC	3 Kilowatts
	RF	1 Kilowatt
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 - 5 amps
	Operating Pressure	1 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	1.5 GPM / 0.095 LPS
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	6.0" / 152.4 mm
	Thickness	0.10" - 0.5" / .254 mm - 12.7 mm
	Cooling	indirect
	Magnetic Enhancement	Permanent [NdFeB] Encapsulated
	Weight	22 lbs / 9.979 kg
	Mounting
	Source [“o”-ring seal]	1.0" / 25.4 mm
	Water [OD tubing]	0.375" / 9.525 mm
	Power Connector, DC	Type HN, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG 393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE/CTFE
	Dimensions
	A	7.125" / 180.975 mm
	B	3.67" / 93.218 mm
	C	1.438" / 36.5252 mm
	D	1.0" / 25.4 mm typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON-6-STD		1.00" O.D. Stem Tube, Standard	$ 0
B-ON-6-Unbalanced		1.00" O.D. Stem Tube, Unbalanced Configuration	$ 0
C-ON-6-MAG II		1.00" O.D. Stem Tube, Magnetic Materials	$ 0
D-ON-6-DC		1.00" O.D. Stem Tube, Direct Cooled	$ 0
E-ON-6-DC-Unbalanced		1.00" O.D. Stem Tube, Direct Cooled Unbalanced	$ 0
F-ON-6-DC-MAG-II		1.00" O.D. Stem Tube, Direct Cooled Magnetic Materials	$ 0
G-ON-6-UHV*		Flange Mount, UHV	$ 0
H-ON-6-EX		External Mount, Standard	$ 0
I-ON-6-EX-Unbalanced		External Mount, Unbalanced	$ 0
J-ON-6-EX-MAG-II		External Mount, Magnetic Materials	$ 0
K-ON-6-HT		1.00" O.D. Stem Tube, High Temperature	$ 0
L-ON-6-HT-Unbalanced		1.00" O.D. Stem Tube, High Temp. Unbalanced	$ 0
M-ON-6-HT-MAG-II		1.00" O.D. Stem Tube, High Temper. Magnetic Materials	$ 0
N-ON-6-R		1.00" O.D. Stem Tube, Rotateable	$ 0
O-ON-675-R		1.00" O.D. Stem Tube, Rotateable	$ 0
P-ON-7-R		1.00" O.D. Stem Tube, Rotateable	$ 0