Onyx-8 Indirect Cool

Product Brochure

Now Representing Angstrom Sciences

	Onyx-8 Indirectly Cooled
	Maximum Sputtering Power
	DC	5 Kilowatts
	RF	1.6 Kilowatt
	Cathode Voltage	100 to 1500
	Discharge Current	0.1 to 20 amps
	Operating Pressure	0.5 to 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	4 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	8.0" / 203.2 mm
	Thickness	0.125" - 0.500" (3.175 mm - 12.7 mm)
	Cooling	indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	60 lbs
	Mounting
	Source [“o”-ring seal]	1.5" OD Tubing
	Water [OD tubing]	0.375" OD Tubing
	Power Connector, DC	Type HN, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG 393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	10.06" / 255.5 mm
	B	6.32" / 160.5 mm
	C	2.38" / 60.32 mm
	D	1.5" / 38.1 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.Some custom-engineered and specialty magnetrons may not meet standard specifications.All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.All sources available in various external configurations.Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON-8DC		1.50" Stem Tube,Standard	$ 0
B-ON-8DC Unbalanced		1.50" Stem Tube,Unbalanced Configuration	$ 0
C-ON-8MAG II		1.50" Stem Tube,Magnetic Materials	$ 0
D-ON-8EX		External Mount	$ 0
E-ON-8EX Unbalanced		External Mount Unbalanced	$ 0
F-ON-8EX MAG II		External Mount, Magnetic Materials	$ 0
G-ON-8HT		1.50" Stem Tube, Hight Temperature	$ 0
H-ON-8HT Unbalanced		1.50" Stem Tube, High Temperature, Unbalanced	$ 0
I-ON-8HT MAG II		1.50" Stem Tube, High Temperature, Magnetic Materials	$ 0
J-ON-8R		1.50" Stem Tube,Magnetic Materials	$ 0
K-ON-9R		9 inch Source, 1.50" Stem Tube, Rotateable	$ 0
L-ON-10DC		1.50" Stem Tube, Direct Cooled	$ 0
M-ON-10R		10 inch source, 1.50" Stem Tube, Rotateable	$ 0