Onyx-16 Indirect Cool

Product Brochure

Now Representing Angstrom Sciences

	Onyx-16 Indirectly Cooled
	Maximum Sputtering Power
	DC	20 Kilowatts
	RF	7 Kilowatts
	Cathode Voltage	100 to 1500 volts
	Discharge Current	0.1 to 50 amps
	Operating Pressure	0.5 to 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	8 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	16.0" / 406.4 mm
	Thickness	0.250" - 0.500 "  (6.35 mm - 12.7 mm)
	Cooling	indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	220 lbs
	Mounting
	Source [“o”-ring seal]	2.0" OD Tubing
	Water [OD tubing]	0.50" OD Tubing
	Power Connector, DC	Process/ System Specific
	Power Connector RF	Process/ System Specific
	Power Cable, DC/RF	Process/ System Specific
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	18.5" / 470 mm
	B	4.0" / 101.6 mm
	C	2.50" / 63.5 mm
	D	2.0" / 50.8 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON16-DC		16" Sputter Target, 2.00" Stem Tube, Direct Cooled	$ 0
B-ON-16-R		16 inch Source, 1.50 Stem Tube, Rotateable	$ 0