| | Onyx-1 Indirect | |
| | Maximum Sputtering Power | |
| | DC | 150 Watts |
| | RF | 75 Watts |
| | Cathode Voltage | 100 - 1000 volts |
| | Discharge Current | 0.1 - 1 amp |
| | Operating Pressure | 2 - 50 milliTorr |
| | Cooling Requirements | |
| | Flow Rate @ Max. Power | .3 GPM / 0.019 LPS |
| | Max. Input Temperature | 68º F / 20º C |
| | Max. Input Pressure [open drain] | 60 psig / 4 Bar |
| | Target | |
| | Form | Circular/Planar |
| | Diameter | 1.0" / 25.4 mm (+.000" / -.010")/(+000 mm/-.254 mm) |
| | Thickness | 0.010" - 0.0625" / 0.254 mm - 1.5875 mm |
| | Cooling | indirect |
| | Magnetic Enhancement | Permanent [NdFeB] Encapsulated |
| | Weight | 6.4 oz / 181.437 g |
| | Mounting | |
| | Source [“o”-ring seal] | 1.0" / 25.4 mm |
| | Water [OD tubing] | 0.187" / 4.7498 mm |
| | Power Connector, DC/RF | Type N Connector |
| | Power Cable, DC/RF | RG 142 |
| | Maximum Temperature | 212º F / 100º C |
| | Source to Substrate Distance | 2.0" - 12.0" / 50.8mm - 304.8 mm |
| | Construction | |
| | Cathode Body | OFHC Copper |
| | Anode | 304 Stainless Steel |
| | Insulator | CTFE |
| | Dimensions | |
| | A | 1.5" / 38.1 mm |
| | B | 1.465" / 37.211 mm |
| | C | 0.5" / 12.7 mm |
| | D | 0.75" / 19.05 mm Typical |
