Onyx-3 Indirect Cool

Product Brochure

Now Representing Angstrom Sciences

	Onyx-3 Indirectly Cooled
	Maximum Sputtering Power
	DC	1.5 Kilowatts
	RF	700 Watts
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 - 3 amp
	Operating Pressure	0.5 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	0.75 GPM / 0.047 LPS
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	3.0" / 76.2 mm
	Thickness	0.010" - 0.375" / 0.254 mm - 9.525 mm
	Cooling	indirect
	Magnetic Enhancement	Permanent [NdFeB] Encapsulated
	Weight	3 lbs / 1.361 kg
	Mounting
	Source [“o”-ring seal]	0.75" / 19.05 mm Typical
	Water [OD tubing]	0.25" / 6.35 mm
	Power Connector, DC	Type N, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG 1675 A
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 Stainless Steel
	Insulator	CTFE
	Dimensions
	A	3.8" / 96.52 mm
	B	2.469" / 62.7126 mm
	C	0.06" / 1.524 mm
	D	0.75 / 19.05 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON-3-STD		O.75" O.D. Stem Tube, Standard	$ 0
B-ON-3-Unbalanced		O.75" O.D. Stem Tube, Unbalanced Configuration	$ 0
C-ON-3-MAG II		O.75" O.D. Stem Tube, Magnetic Materials	$ 0
D-ON-3-DC		O.75" O.D. Stem Tube, Direct Cooled	$ 0
E-ON-3-DC-Unbalanced		O.75" O.D. Stem Tube, Direct Cooled Unbalanced	$ 0
F-ON-3-DC-MAG-II		O.75" O.D. Stem Tube, Direct Cooled Magnetic Materials	$ 0
G-ON-3-UHV*		Flange Mount, UHV	$ 0
H-ON-3-UHV Unbalanced		Flange Mount, UHV Unbalanced	$ 0
I-ON-3-UHV MAG II*		Flange Mount, UHV Magetic Materials	$ 0
J-ON-3-HT		0.75" O.D. Stem Tube, High Temperature	$ 0
K-ON-3-HT-Unbalanced		0.75" O.D. Stem Tube, High Temperature Unbalanced	$ 0
L-ON-3-HT-MAG-II		0.75" O.D. Stem Tube, High Temperature Magnetic Materials	$ 0