Onyx-3 Direct Cooled

Product Brochure

Now Representing Angstrom Sciences

	Onyx-3 Direct Cool
	Maximum Sputtering Power
	DC	1.75 Kilowatts
	RF	700 Watts
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 - 3 amp
	Operating Pressure	0.5 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	1.00 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	3.0" / 76.2 mm
	Thickness	0.010" - 0.250" (.254 mm - 6.35 mm)
	Cooling	Direct
	Magnetic Enhancement	Profiled NdFeB
	Weight	6 lbs.
	Mounting
	Source [“o”-ring seal]	1.0" OD Tubing
	Water [OD tubing]	0.375" OD Tubing
	Power Connector, DC	Type UHF, Internal Threads
	Power Connector RF	Type HN, External Threads
	Power Cable DC	RG 8
	Power Cable RF	RG 393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	CTFE
	Dimensions
	A	4.649" / 118.0800 mm
	B	3.024" / 0.76.800 mm
	C	1.662" / 042.2148 mm
	D	1.000" / 025.4000 mm

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON-3-DC		0.75" OD Stem Tube, Direct Cooled	$ 0
B-ON-3-DC-Unbalanced		0.75" OD Stem Tube, Direct Cooled, Unbalanced	$ 0
C-ON-3-DC-MAG-II		0.75" OD Stem Tube, Direct Cooled, Magnetic Materials	$ 0