| | Onyx-6 Direct Cool | |
| | Maximum Sputtering Power | |
| | DC | 7 Kilowatts (3 Kilowatts in clamped mode) |
| | RF | 2.5 Kilowatts (1 Kilowatt in clamped mode) |
| | Cathode Voltage | 100 - 1500 volts |
| | Discharge Current | 0.1 to 12 amps |
| | Operating Pressure | 1 - 50 milliTorr |
| | Cooling Requirements | |
| | Flow Rate @ Max. Power | 3 GPM |
| | Max. Input Temperature | 68º F / 20º C |
| | Max. Input Pressure [open drain] | 60 psig / 4 Bar |
| | Target | |
| | Form | Circular/Planar |
| | Diameter | 6.0" / 152.4 mm |
| | Thickness | 0.250" - 0.750" (6.35 mm - 19.05 mm) |
| | Cooling | direct |
| | Magnetic Enhancement | Profiled NdFeB |
| | Weight | 50 lbs |
| | Mounting | |
| | Source [“o”-ring seal] | 1.0" / 25.4 mm |
| | Water [OD tubing] | 0.375" / 9.525 mm |
| | Power Connector, DC | Type HN, External Threads |
| | Power Connector RF | Type HN, External Threads |
| | Power Cable, DC/RF | RG 393 |
| | Maximum Temperature | 212º F / 100º C |
| | Source to Substrate Distance | 2.0" - 12.0" / 50.8mm - 304.8 mm |
| | Construction | |
| | Cathode Body | OFHC Copper |
| | Anode | 304 / 316 Stainless Steel |
| | Insulator | PTFE |
| | Dimensions | |
| | A | 8.45" / 214.7 mm |
| | B | 5.17" / 131.3 mm |
| | C | 1.38" / 034.9 mm |
| | D | 1.0" / 25.4 mm typical |
