| | Onyx-16 Directly Cooled |
| | Maximum Sputtering Power | |
| | DC | 50 Kilowatts (20 Kilowatts in clamped mode) |
| | RF | 16 Kilowatts (7 Kilowatts in clamped mode) |
| | Cathode Voltage | 100 to 1500 volts |
| | Discharge Current | 0.1 to 80 amps |
| | Operating Pressure | 0.5 to 50 milliTorr |
| | Cooling Requirements | |
| | Flow Rate @ Max. Power | 13 GPM |
| | Max. Input Temperature | 68º F / 20º C |
| | Max. Input Pressure [open drain] | 60 psig / 4 Bar |
| | Target | |
| | Form | Circular/Planar |
| | Diameter | 16.0" / 406.4 mm |
| | Thickness | 0.250" - 0.500 " (6.35 mm - 12.7 mm) |
| | Cooling | Direct/Indirect |
| | Magnetic Enhancement | Profiled NdFeB |
| | Weight | 220 lbs |
| | Mounting | |
| | Source [“o”-ring seal] | 2.0" OD Tubing |
| | Water [OD tubing] | 0.50" OD Tubing |
| | Power Connector, DC | Process/ System Specific |
| | Power Connector RF | Process/ System Specific |
| | Power Cable, DC/RF | Process/ System Specific |
| | Maximum Temperature | 212º F / 100º C |
| | Source to Substrate Distance | 2.0" - 12.0" / 50.8mm - 304.8 mm |
| | Construction | |
| | Cathode Body | OFHC Copper |
| | Anode | 304 / 316 Stainless Steel |
| | Insulator | PTFE |
| | Dimensions | |
| | A | 18.5" / 470 mm |
| | B | 4.0" / 101.6 mm |
| | C | 2.50" / 63.5 mm |
| | D | 2.0" / 50.8 mm Typical |
