Onyx-4 Direct Cooled

Product Brochure

Now Representing Angstrom Sciences

	Onyx-4 Direct Cool
	Maximum Sputtering Power
	DC	3.5 Kilowatts (2.0 Kilowatts in clamped mode)
	RF	1.25 Kilowatts (700 Watts in clamped mode)
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 to 7 amps
	Operating Pressure	0.5 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	2.0 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	4.0" / 101.6 mm
	Thickness	0.010" - 0.500" (0.254 mm - 12.7 mm)
	Cooling	Direct/Indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	26 lbs
	Mounting
	Source [“o”-ring seal]	1.0" OD Tubing
	Water [OD tubing]	0.38" OD Tubing
	Power Connector, DC	Type HN, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	6.11" / 152.2 mm
	B	4.51" / 114.5 mm
	C	1.0" / 25.4 mm
	D	0.75 / 19.05 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-ON-4-DC		1.00" O.D. Stem Tube, Direct Cooled	$ 0
B-ON-4-DC-Unbalanced		1.00" O.D. Stem Tube, Direct Cooled Unbalanced	$ 0
C-ON-4-DC-MAG-II		1.00" O.D. Stem Tube, Direct Cooled Magnetic Materials	$ 0