Onyx-12 Direct Cooled

Product Brochure

Now Representing Angstrom Sciences

	Onyx-12 Direct Cooled
	Maximum Sputtering Power
	DC	30 Kilowatts (11 Kilowatts in clamped mode)
	RF	10 Kilowatts (4 Kilowatts in clamped mode)
	Cathode Voltage	100 to 1500 volts
	Discharge Current	0.1 to 50 amps
	Operating Pressure	0.5 to 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	8 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	12" / 304.8 mm
	Thickness	0.250" - 0.500 "  (6.35 mm - 12.7 mm)
	Cooling	Direct/Indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	120 lbs
	Mounting
	Source [“o”-ring seal]	2.0" OD Tubing
	Water [OD tubing]	0.50" OD Tubing
	Power Connector, DC	Type HN, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG 393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	14.5" / 368.3 mm
	B	4.0 " / 101.6 mm
	C	2.50" / 63.5 mm
	D	2.0" / 50.8 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
BA-ON-12-DC		12 inch Source, 1.50" Stem Tube, Direct Cooled	$ 0
BA-ON-14-DC		14 inch Source, 2.00" Stem Tube, Direct Cooled	$ 0