Onyx-10 Direct Cooled

Product Brochure

Now Representing Angstrom Sciences

	Onyx-10 Direct Cooled
	Maximum Sputtering Power
	DC	20 Kilowatts (7 Kilowatts in clamped mode)
	RF	6 Kilowatts (2.5 Kilowatts in clamped mode)
	Cathode Voltage	100 to 1500 volts
	Discharge Current	0.1 to 30 amps
	Operating Pressure	0.5 to 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	5 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	10.0" / 254 mm
	Thickness	0.250" - 0.500 "  (6.35 mm - 12.7 mm)
	Cooling	Direct / Indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	100 lbs
	Mounting
	Source [“o”-ring seal]	2.0" OD Tubing
	Water [OD tubing]	0.50" OD Tubing
	Power Connector, DC	Type HN, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable, DC/RF	RG 393
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	12.057" / 306.24 mm
	B	4.039" / 102.59 mm
	C	2.281" / 57.94 mm
	D	2.00" / 50.80 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
A-On-10-DC		10 inch Source, 1.50" Stem Tube, Direct Cooled	$ 0