Onyx-3HT

Product Brochure

Now Representing Angstrom Sciences

	Onyx-3 HT
	Maximum Sputtering Power
	DC	1.5 Kilowatts
	RF	700 Watts
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 - 3 amp
	Operating Pressure	0.5 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	0.75 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	3.0" / 76.2 mm
	Thickness	0.010" - 0.375" (.254 mm - 9.525 mm)
	Cooling	Indirect
	Magnetic Enhancement	Profiled NdFeB
	Weight	4 lbs.
	Mounting
	Source [“o”-ring seal]	0.75" OD Tubing
	Water [OD tubing]	0.25" OD Tubing
	Power Connector, DC	Type N, External Threads
	Power Connector RF	Type HN, External Threads
	Power Cable DC	RG 142
	Power Cable RF	RG 393
	Maximum Temperature	300º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	Macor
	Dimensions
	A	3.80" / 96.52 mm
	B	2.25" / 57.15 mm
	C	0.06" / 1.52 mm
	D	0.75" / 19.05 mm Typical

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Description	Price	Quantity
AA-ON-1-HT		1" Source, 0.75" OD Stem Tube, High Temperature	$ 0
BB-ON-2-HT		2" Source, 0.75" OD Stem Tube, High Temperature	$ 0
CC-ON-2-HT MAG II		2" Source, 0.75" OD Stem Tube, High Temperature, Magnetic Materials	$ 0
DD-ON-3-HT		3" Source, 0.75" OD Stem Tube, High Temperature	$ 0
EE-ON-3-HT Unbalanced		3" Source, 0.75" OD Stem Tube, High Temperature, Unbalanced	$ 0
FF-ON-3-HT MAG II		3" Source, 0.75" OD Stem Tube, High Temp. Magnetic Materials	$ 0
GG-ON-4-HT		4" Source, 1.00" OD Stem Tube, High Temperature	$ 0
HH-ON-4-HT Unbalanced		4" Source, 1.00" OD Stem Tube, High Temp. Unbalanced	$ 0
II-ON-4-HT MAG II		4" Source, 1.00" OD Stem Tube, High Temp. Magnetic Materials	$ 0
JJ-ON-5-HT		5" Source, 1.00" OD Stem Tube, High Temperature	$ 0
KK-ON-5-HT Unbalanced		5" Source, 1.00" OD Stem Tube, High Temp. Unbalanced	$ 0
LL-ON-5-HT MAG II		5" Source, 1.00" OD Stem Tube, High Temp. Magnetic Materials	$ 0
MN-ON-6-HT		6" Source, 1.00" OD Stem Tube, High Temperature	$ 0
NO-ON-6HT Unbalanced		6" Source, 1.00" OD Stem Tube, High Temp. Unbalanced	$ 0
OP-ON-6HT MAG II		6" Source, 1.00" OD Stem Tube, High Temp. Magnetic Materials	$ 0
PQ-ON-8HT		8" Source, 1.50" OD Stem Tube, High Temperature	$ 0
QR-ON-8HT Unbalanced		8" Source, 1.50" OD Stem Tube, High Temp. Unbalanced	$ 0
RS-ON-8HT MAG II		8" Source, 1.50" OD Stem Tube, High Temp. Magnetic Materials	$ 0