Onyx-675R

Product Brochure

Now Representing Angstrom Sciences

	Onyx-675R
	Maximum Sputtering Power
	DC	8 Kilowatts
	RF	4 Kilowatts
	Cathode Voltage	100 - 1500 volts
	Discharge Current	0.1 to 12 amps
	Operating Pressure	1 - 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	2 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	6.75" / 171.45 mm
	Thickness	0.125" - 0.750"  (3.175 mm - 19.05 mm)
	Cooling	Direct / Bonded
	Magnetic Enhancement	Profiled NdFeB
	Weight	60 lbs
	Mounting
	Source [“o”-ring seal]	External Flange O-Rng Seal
	Water [OD tubing]	0.50" OD Tubing
	Power Connector, DC	Screw Termination
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	11.937" / 303.20 mm
	B	9.188" / 233.38 mm
	C	6.750" / 171.45 mm
	D	3.750" / 95.25 mm
	E	13.758" / 349.45 mm

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Size	Housing	Description	Price	Quantity
A-ON-6-R		6" Source	1.00" OD Stem Tube	Rotateable	$ 0
B-ON-675-R		6.75" Source	1.00" OD Stem Tube	Rotateable	$ 0
C-ON-7-R		7" Source	1.00" OD Stem Tube	Rotateable	$ 0
D-ON-8-R		8" Source	1.50" Stem Tube	Rotateable	$ 0
E-ON-9-R		9" Source	1.50" Stem Tube	Rotateable	$ 0
F-ON-10-R		10" Source	1.50" Stem Tube	Rotateable	$ 0
G-ON-16-R		16" Source	1.50" Stem Tube	Rotateable	$ 0