Onyx-12R

Product Brochure

Now Representing Angstrom Sciences

	Onyx-12R
	Maximum Sputtering Power
	DC	28 Kilowatts - Direct Cooled Target
		5 Kilowatts - Indirect Cooled Target
	RF	9 Kilowatts- Direct Cooled
		1.6 Kilowatts - Indirect Cooled Target
	Cathode Voltage	100 to 1500 volts
	Discharge Current	0.1 to 47 amps
	Operating Pressure	0.5 to 50 milliTorr
	Cooling Requirements
	Flow Rate @ Max. Power	7 GPM
	Max. Input Temperature	68º F / 20º C
	Max. Input Pressure [open drain]	60 psig / 4 Bar
	Target
	Form	Circular/Planar
	Diameter	12" / 304.8 mm
	Thickness	0.125" - 0.750" (3.175 mm - 19.05 mm)
	Cooling	Direct / Bonded
	Magnetic Enhancement	Profiled NdFeB
	Weight	120 lbs
	Mounting
	Source [“o”-ring seal]	External Flange O-Ring Seal
	Water [OD tubing]	0.50" OD Tubing
	Power Connector, DC	Screw Termination
	Maximum Temperature	212º F / 100º C
	Source to Substrate Distance	2.0" - 12.0" / 50.8mm - 304.8 mm
	Construction
	Cathode Body	OFHC Copper
	Anode	304 / 316 Stainless Steel
	Insulator	PTFE
	Dimensions
	A	17.180" / 436.37 mm
	B	14.438" / 366.73 mm
	C	12.00" / 304.80 mm
	D	3.750"/ 95.25 mm
	E	13.750" / 349.25 mm

• Typical Performance.  Results may vary with process parameters such as pressure, flow rate, target material, and substrate rotation, etc.
• Some custom-engineered and specialty magnetrons may not meet standard specifications.
• All Angstrom Sciences NdFeB magnets are totally encapsulated and protected from degradation by water.
• All sources available in various external configurations.
• Specifications are subject to change without notice.

Part Number		Size	Housing	Description	Price	Quantity
DA-ON-6-R		6" Source	1.00" OD Stem Tube	Rotateable	$ 0
DB-ON-675-R		6.75" Source	1.00" OD Stem Tube	Rotateable	$ 0
DC-ON-7-R		7" Source	1.00" OD Stem Tube	Rotateable	$ 0
DD-ON-8-R		8" Source	1.50" Stem Tube	Rotateable	$ 0
DE-ON-9-R		9" Source	1.50" Stem Tube	Rotateable	$ 0
DF-ON-10-R		10" Source	1.50" Stem Tube	Rotateable	$ 0
DG-ON-16-R		16" Source	1.50" Stem Tube	Rotateable	$ 0