Product Brochure
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Product Brochure |
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| Rectangular Magnetrons | ||
| Linear | ||
| Maximum Sputtering Power | ||
| Direct Cooled, DC | Maximum Watts/ Sq. Inch = 250 | |
| Direct Cooled, RF | Maximum Watts/ Sq. Inch = 83 | |
| Indirect Cooled, DC | Maximum Watts/ Sq. Inch = 100 | |
| Indirect Cooled, RF | Maximum Watts/ Sq. Inch = 33 | |
| Cathode Voltage | 100 to 1500 volts | |
| Discharge Current | 0.4 amps / Sq. Inch | |
| Operating Pressure | 0.5 to 50 milliTorr | |
| Cooling Requirements | ||
| Flow Rate @ Max. Power | 1 GPM / 4KW | |
| Max. Input Temperature | 68º F / 20º C | |
| Max. Input Pressure [open drain] | 60 psig / 4 Bar | |
| Target | ||
| Form | Rectangular/Planar | |
| Diameter | 1.5"/38.mm | |
| 3.5"/88.9mm | ||
| 5.0" / 127 mm | ||
| 6.0"/ 152.4 mm | ||
| Thickness | Typical 0.250"/6mm | |
| 0.50"/12.7mm | ||
| 0.75"/19mm | ||
| 1.0"/25.4mm | ||
| 0.125" - 0.750" (3.175 mm - 19.05 mm) | ||
| Cooling | Indirect / Direct | |
| Magnetic Enhancement | Permanent [NdFeB] | |
| Weight | Weight depends on dimensions | |
| Mounting | ||
| Source [“o”-ring seal] | Customer Specified | |
| Water [OD tubing] | Customer Specified | |
| Power Connector, DC | Customer Specified | |
| Maximum Temperature | 212º F / 100º C | |
| Source to Substrate Distance | 2.0" - 12.0" / 50.8mm - 304.8 mm | |
| Construction | ||
| Cathode Body | OFHC Copper | |
| Anode | 304 / 316 Stainless Steel | |
| Insulator | PTFE | |
| Dimensions [See Above] | ||
| A | ||
Internal Mount | Target Length + 2.0 / 50.8 mm | |
External Mount | Target Length + 3.5" / 88.9 mm | |
| B | ||
Internal Mount | Target Width + 2.0" / 50.88 | |
External Mount | Target Width +3.5" / 88.9 mm | |
| C | ||
Internal Mount | 3.5" / 88.9mm Typical | |
External Mount | 3.5" / 88.9mm Typical | |
| D | ||
Internal Mount | N/A | |
External Mount | Target Width + 2.0" / 50.8mm | |
| E | ||
Internal Mount | N/A | |
External Mount | Target Length + 2.0" / 50.8mm | |
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| Part Number | Description | Price | Quantity | ||