UHV Magnetron Sources

Product File

Product Brochure
 
Now Representing Angstrom Sciences

Ultra High Vacuum 

Ultra Clean

For applications that require an extremely high degree of cleanliness, Angstrom Sciences offers a complete selection of circular and rectangular UHV magnetrons.  

100% Welded Construction

Available in targets up to 8" diameter, these cathodes feature 100% welded construction, with no metal or elastomer "O"-ring seals that can lead to out-gassing.  

Contamination Free

Their magnetic arrays are completely de-mountable while the source and target remain in situ and under vacuum. That means contaminants won't condense on the target surface as you bake the chamber out, because you don't have to run coolant water through the source.  

Magnetic Flexibility

This magnetron design makes an extremely flexible research tool, because the magnets can be changed quickly and easily to facilitate unbalanced sputtering or work with magnetic materials.  

Full Compatibility 

Our sources are compatible with all DC and RF power supplies, and are fitted with a wire mesh shield for safe use in RF applications.  

Extensive Options

And, naturally, they can be provided with a complete range of options, including a variety of insertion lengths, shutters, and gas inlet rings.  

UHV Magnetron Sizes

Target Diameter

Minimum CF Flange Size

Insertion Lengths

1"

2.75

0 - 24"

2"

4.63

0 - 24"

3"

6.00

0 - 24"

4"

8.00

0 - 18"

6"

10.00

0 - 12"

8"

13.25

0 - 12"


Part Number Size Housing Description Price Quantity
A-ON-1-UHV* 1" Source  Flange Mount  UHV  $ 0  
B-ON-2-UHV* 2" Source  Flange Mount  UHV  $ 0  
C-ON-2-UHV MAG II 2" Source  Flange Mount  UHV Magnetic Materials  $ 0  
D-ON-3-UHV 3" Source  Flange Mount  UHV  $ 0  
E-ON-3-UHV Unbalanced 3" Source  Flange Mount  UHV Unbalanced  $ 0  
F-ON-3-UHV MAG II 3" Source  Flange Mount  UHV Magnetic Materials  $ 0  
G-ON-4-UHV 4" Source  Flange Mount  UHV  $ 0  
I-ON-4-UHV MAG II 4" Source  Flange Mount  UHV Magnetic Materials  $ 0  
J-ON-5-UHV 5" Source  Flange Mount  UHV   $ 0  
K-ON-5-UHV Unbalanced 5" Source  Flange Mount  UHV Unbalanced  $ 0  
L-ON-5-UHV MAG II 5" Source  Flange Mount  UHV Magnetic Materials  $ 0  
M-ON-6-UHV 6" Source  Flange Mount  UHV   $ 0