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Nucleus (TM) Film-Thickness Monitor

Part Number: PT-TFM

After receiving feedback that not every customer requires process or temperature control, Phillip Technologies designed a monitor with the same level of innovation and excellence as the Nucleus Plus" Film Thickness Controller, but stripped it to the bare essentials to provide a more compact unit at a lower price point. Welcome to the Nucleus" PC-Based Film Thickness Monitor.

Just like its older brother, Nucleus" is a temperature measuring film thickness monitor. This surpasses conventional monitors that are blind to thermal changes of the crystal. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring.

Why measure temperature? Because the frequency change of a crystal by process heating can easily be equal to the frequency change caused by coating. In normal operation there is a built-in 10% error in most rate measurements. In the worst case it can be 100%. Why measure if your measurements are always wrong?

While the Nucleus" is compatible with industry standard crystal sensors, it was also specifically designed to be paired with Phillip Technologiess Proton Plus" thermal sensing sensor head in combination with AT", RC", and MegaQuartz (MQ") 6 MHz crystals for a degree of precision never before imagined in the world of thin film. However, The Nucleus" is still compatible with all standard sensor-heads like the Phillip Technologies Proton!

  • Real-time temperature measurement


Description Nucleus (TM) Film-Thickness Monitor
Features Real-time temperature measurement
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