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Feedthrough Flange Type

Proton Plus(TM) Sensor Head with Thermocouple and Feedthrough

Part Number: PTSS-2


The Proton Plus" Sensor Head adds a new level of control to the thin film deposition process by utilizing an embedded thermocouple that may be read with a simple thermocouple meter. When the Proton Plus" Sensor Head is integrated with the Nucleus" Film Thickness Monitor, both temperature and frequency are automatically graphed alongside the corresponding rate and thickness values on a personal computer, allowing for real-time correction and accuracy up to .001 Hz.

  • 1" Bolt, KF, CF

Details

Description Proton Plus(TM) Sensor Head with Thermocouple and Feedthrough
Flange Options 1" Bolt, KF, CF
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