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Cryopump Compressors

Sumitomo HC-4E1 Water-Cooled Compressor
  • 2.7L/min, 4-27C Water Cooling
  • 200,230/240V, 50 ... AC Supply
  • 2.6kW at 5... Power Consumption
Quote SHI-HC-4E1
Sumitomo HC-8E4 Water-Cooled Compressor
  • 5.7-5.9 L/min, 4-21C ... Cooling
  • 220V 50Hz, 2... AC Supply
  • 3.7kW at 5... Power Consumption
Quote SHI-8E4
Sumitomo F-70L/H Water-Cooled Compressor
  • 6-9 L/min, 5-25C Water Cooling
  • 200V, 50/60Hz (LV) ... AC Supply
  • 6.6-6.9kW ... Power Consumption
Quote SHI-F-70
Zephyr Air-Cooled Compressor
  • 20m^3/min (706cfm) Air Cooling
  • 3.0kW at 50 Hz, ... AC Supply
  • 200-2... Power Consumption
Quote SHI-Zephyr
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