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Wide-Range Turbos for PVD

Visit www.shimadzu.com/products/industrial/tmp/index.html for more information and product documentation. 

Available in both water and air cooled versions, the Wide-Range xx03M and xx03LM series are designed for use in Physical Vapor Deposition (PVD) applications.

Shimadzu TMP-1003 Series Turbopumps
  • 1x10^-11 ... Ultimate Pressure
  • 1080 l/s N2 peak Pumping Speed
  • 200mm Inlet Flange
Quote TMP-1003
Shimadzu TMP-1303 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 1300 l/s N2 peak Pumping Speed
  • 200mm Inlet Flange
Quote TMP-1303
Shimadzu TMP-1503 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 1500 l/s Pumping Speed
  • 250mm Inlet Flange
Quote TMP-1503
Shimadzu TMP-203 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 190 l/s N2 peak Pumping Speed
  • 100mm Inlet Flange
Quote TMP-203
Shimadzu TMP-303 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 190 l/s N2 peak Pumping Speed
  • 100mm Inlet Flange
Quote TMP-303
Shimadzu TMP-3304LM Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 3200 l/s N2 Pumping Speed
  • 300mm Inlet Flange
Quote TMP-3304LM
Shimadzu TMP-403 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 420 l/s N2 peak Pumping Speed
  • 150mm Inlet Flange
Quote TMP-403
Shimadzu TMP-803 Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 800 l/s N2 peak Pumping Speed
  • 105mm Inlet Flange
Quote TMP-803
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