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High-throughput Turbopumps for CVD, Etching

Visit www.shimadzu.com/products/industrial/tmp/index.html for more information and product documentation.

Shimadzu TMP-2804 Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 2800 l/s N2 Pumping Speed
  • 250mm Inlet Flange
Quote TMP-2804
Shimadzu TMP-3304 Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 3200 l/s N2 Pumping Speed
  • 300mm Inlet Flange
Quote TMP-3304
Shimadzu TMP-4304 Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 4400 l/s N2 Pumping Speed
  • 350mm/400mm Inlet Flange
Quote TMP-4304
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