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Coated High-Throughput Turbopumps for Etching

Visit www.shimadzu.com/products/industrial/tmp/index.html for more information and product documentation. 

Shimadzu TMP-1003LMTC Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 1080 l/s N2 peak Pumping Speed
  • 200mm Inlet Flange
Quote TMP-1003LMTC
Shimadzu TMP-1303LMTC Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 1300 l/s N2 peak Pumping Speed
  • 200mm Inlet Flange
Quote TMP-1303LMTC
Shimadzu TMP-203LMTC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 190 l/s N2 Pumping Speed
  • 100mm Inlet Flange
Quote TMP-203LMTC
Shimadzu TMP-2203 Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 2140 l/s N2 peak Pumping Speed
  • 250mm Inlet Flange
Quote TMP-2203LMTC
Shimadzu TMP-2804LMTC Series Turbopumps
  • 1x10^-9 Torr Ultimate Pressure
  • 2800 l/s N2 peak Pumping Speed
  • 250mm Inlet Flange
Quote TMP-2804LMTC
Shimadzu TMP-303LMTC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 320 l/s N2 Pumping Speed
  • 100mm Inlet Flange
Quote TMP-303LMTC
Shimadzu TMP-3304LMTC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 3200 l/s N2 Pumping Speed
  • 300mm Inlet Flange
Quote TMP-3304LMTC
Shimadzu TMP-403LMTC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 420 l/s N2 peak Pumping Speed
  • 150mm Inlet Flange
Quote TMP-403LMTC
Shimadzu TMP-4304LMTC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 4400 l/s N2 Pumping Speed
  • 350mm/400mm Inlet Flange
Quote TMP-4304LMTC
Shimadzu TMP-803LMTC Series Turbopumps
  • 1x10^-10 ... Ultimate Pressure
  • 800 l/s N2 peak Pumping Speed
  • 150mm Inlet Flange
Quote TMP-803LMTC
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