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Coated Wide-Range Turbopumps for Ion Implantation, CVD and Etching

Visit www.shimadzu.com/products/industrial/tmp/index.html for more information and product documentation.

Shimadzu TMP-1003LMC Turbopump
  • 1x10^-10 ... Ultimate Pressure
  • 1080 l/s N2 peak Pumping Speed
  • ISO200 F, CF1000 Inlet Flange
Quote TMP-1003LMC
Shimadzu TMP-203LMC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 190 l/s N2 peak Pumping Speed
  • ISO100 F/K, CF600 Inlet Flange
Quote TMP-203LMC
Shimadzu TMP-303LMC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 320 l/s N2 peak Pumping Speed
  • ISO100 F/K, CF600 Inlet Flange
Quote TMP-303LMC
Shimadzu TMP-403LMC Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 420 l/s N2 peak Pumping Speed
  • ISO160 F/K, CF800 Inlet Flange
Quote TMP-403LMC
Shimadzu TMP-803LMC Turbopump
  • 1x10^-10 ... Ultimate Pressure
  • 800 l/s N2 peak Pumping Speed
  • ISO160 F, CF800 Inlet Flange
Quote TMP-803LMC
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