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Turbopumps for PVD, CVD and Etching with Integrated Controllers

Visit www.shimadzu.com/products/industrial/tmp/index.html for more information and product documentation.

Shimadzu TMP-V2304LM Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 2100 l/s Pumping Speed
  • ISO250 F Inlet Flange
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Shimadzu TMP-V3304LM Turbopump
  • 1x10^-9 Torr Ultimate Pressure
  • 3200 l/s N2 Pumping Speed
  • ISO320 F Inlet Flange
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