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HD Series

Based on the original screw pumping designs that established the superior performance of LOT dry vacuum pumps, the Dura-Dry line provides world class performance in the harshest Semiconductor CVD and Deep Trench Etch applications.

Visit www.lotvacuumamerica.com for more information and product documentation. 

HD120 Hybrid Screw Pump
  • 2000 l/m Pumping Speed
  • < 5x10^-3 ... Ultimate Pressure
  • ISO 63KF Inlet Flange
Quote HD120
HD1200 Hybrid Screw Pump
  • 18920 l/m Pumping Speed
  • < 5x10^-3 ... Ultimate Pressure
  • ISO 100K Inlet Flange
Quote HD1200
HD1855 Hybrid Screw Pump
  • 30006 l/m Pumping Speed
  • < 5x10^-3 ... Ultimate Pressure
  • ISO 160KF Inlet Flange
Quote HD1855
HD600 Hybrid Screw Pump
  • 11336 l/m Pumping Speed
  • < 5x10^-3 ... Ultimate Pressure
  • ISO 63KF Inlet Flange
Quote HD600
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