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DD105 Series

Based on the original screw pumping designs that established the superior performance of LOT dry vacuum pumps, the Dura-Dry line provides world class performance in the harshest Semiconductor CVD and Deep Trench Etch applications.

Visit www.lotvacuumamerica.com for more information and product documentation. 

DD105 DuraDry Pump
  • 1750 l/m Pumping Speed
  • < 5x10^-3 ... Ultimate Pressure
  • ISO63K Inlet Flange
Quote DD105
DD1205 DuraDry Pump
  • 13503 l/m Pumping Speed
  • < 6x10^-4 ... Ultimate Pressure
  • ISO100K Inlet Flange
Quote DD1205
DD2005 DuraDry Pump
  • 33673 l/m Pumping Speed
  • < 5x10^-4 ... Ultimate Pressure
  • ISO160K Inlet Flange
Quote DD2005
DD605 DuraDry Pump
  • 8002 l/m Pumping Speed
  • < 6x10^-4 ... Ultimate Pressure
  • ISO63K Inlet Flange
Quote DD605
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