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Atmospheric Robotic Arms


Hine atmospheric robots are high-performance substrate handling solutions for semiconductor applications. These SCARA type robots provide reliable and clean transfer mechanism for atmospheric front ends. Hine atmospheric robots transfer a wide variety of substrates including SEMI standard wafers, reticles and masks.

Visit www.hineautomation.com for more information and product documentation. 

Hine Automation HAtm-5.0 Atmospheric Robotic Arm
  • SEMI standard up ... Wafer Sizes
  • 0.5kg max payload Payload
  • R,Z,0 (Theta) ... Axes of Motion
Quote HAtm-50
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