• Scroll Pumps

    Oil-free scroll pumps offer many benefits over traditional rotary vane and piston pumps. These include:

    • Eliminate costly oil changes. Save time/labor, new oil, Hazmat disposal of used oil
    • No risk of back-streaming oil contaminating the process and chamber
    • Green! Meet the increasing environmental concerns, corporate policies and EPA regulations

    The ISP & XDS series is the traditional design proven for many years in the real world, and has the lowest initial investment.

    The nXDS series has the latest technological advancements and greatest benefits.

  • Diaphragm Pumps

    XDD1 diaphragm pumps are used for backing small compound turbomolecular pumps in clean, high vacuum applications, and also designed to be free standing bench top units. A typical ultimate pressure of better than 5 x 10-8 mbar can be achieved when using an XDD1 to back a 70 l/s turbomolecular pump.

  • Large Dry Pumps