Scroll Pumps


Oil-free scroll pumps offer many benefits over traditional rotary vane and piston pumps. These include:

  • Eliminate costly oil changes. Save time/labor, new oil, Hazmat disposal of used oil
  • No risk of back-streaming oil contaminating the process and chamber
  • Green! Meet the increasing environmental concerns, corporate policies and EPA regulations

The ISP & XDS series is the traditional design proven for many years in the real world, and has the lowest initial investment.

The nXDS series has the latest technological advancements and greatest benefits.

Subcategories

  • ISP Series

    ANEST IWATA was the first in the world to develop the air-cooled, oil-free, scroll-type vacuum pumps. Our oil-free scroll vacuum pumps are compact and less noise/vibration emitting than other dry vacuum pumps. They are highly valued by customers who need clean, high quality vacuum, especially in analytical and semiconductor related fields.

    ISP series of vacuum pumps offer a clean vacuum environment and eliminate the nuisance of cumbersome lubricant maintenance or sealing water administration. ISP is free from installation restrictions because of its air-cooled system. ISP maintains low power consumption from atmosphere to maximum pressure. Maximum pressure is 1[Pa] High reliability

    Applications

    • Sputtering equipment, Vacuum deposition equipment, Ion plating equipment
    • Accelerator, Synchrotron Radiation
    • Surface modification, Electron beam process
    • Gas recovery devices
    • Vacuum equipment
    • Leak detectors
    • Device handling system
    • Vacuum furnace, Heat treatment furnace
    • Laboratory use
    • Vacuum packaging machine

    Precaution for dry scroll vacuum pump

    • Evacuation Gases
      This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances.
    • Ambient Temperature
      Use at ambient operation temperature in the range of 5°C to 40°C.
  • DVSL Series

    Precaution for dry scroll vacuum pump

    • Evacuation gases: This pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. ANEST IWATA will not perform maintenance work on pumps which have used hazardous substances.
    • Ambient Temperature: Use at ambient operation temperature in the range of 5°C to 40°C.
  • nXDS Series

    Edwards Vacuum nXDS dry scroll pumps have increased pumping speeds, lower ultimate pressures, reduced noise, and lower power consumption. A key feature is a variable frequency motor which reduces the RPM’s once the ultimate pressure is reached, and increases RPM as the process and pressure dictates, thus saving energy and wear on the tip seal and mechanical components.

    The tip seal is made of leading technology material that significantly extends life. Additionally the tip seal can be easily replaced by the end user in about 30 minutes.

    A gas ballast permits pumping of condensable vapors including water vapor and solvents, opening a new range of applications that were previously off-limits to dry scrolls.

  • XDS Series

    XDS scroll pumps have become the industry standard for dry pumping, providing a robust and clean vacuum pump solution for a range of applications and processes.