The Dycor LC-D Series Residual Gas Analyzer (RGA) offers outstanding performance and light gas resolution, yet is priced to be cost effective. This versatile RGA is ideally suited for use with UHV systems and equipment monitoring of semiconductor and thin film processes in the high-vacuum range. The LC-series RGA has the control electronics mounted directly to the analyzer head. It can be linked to a computer via Ethernet, which permits any number of analyzers to be connected for control from one PC.
The LC-D Series is offered in 1-100, 1-200, and 1-300 AMU ranges, and features an optional channel plate electron multiplier. Optional Dycor System 2000 software further expands the LC-Series capabilities.
|Description||Dycor LC-D Series Residual Gas Analyzer with Ethernet Connectivity|
|Mass Range||1-100 to 1-300 AMU|
|Operating Vacuum Range||10^-4 Torr to UHV|
|Min Detectable Partial Pressure||5 x 10 ^-12 Torr (5 x 10^-14 with Electron Multiplier)|
|Resolution||Adjustable to Constant peak width (0.5AMU at 10% height)|
|Source Sensitivity (Faraday Cup)||2 x 10 -4 Amperes per Torr at detector (measured with N2 at mass 28) with peak width = 0.5 @ 10% height and 1 x 10^-3 Amperes emission current|